The Collaborative International Dictionary of English v.0.48:

Cafeteria \Caf`e*te"ri*a\, n. [Cf. F. cafeti[`e]re.]
   1. A restaurant or caf['e] at which the patrons serve
      themselves with food kept at a counter, typically paying a
      cashier at the end of the counter and taking the food to
      tables to eat. [U. S.]
      [Webster 1913 Suppl. + WordNet 1.5]

   2. a room within a building functioning in the same manner as
      a cafeteria[1]. In certain organizations, as schools, the
      food may be provided gratis.
      [PJC]

WordNet (r) 3.0 (2006):

cafeteria
    n 1: a restaurant where you serve yourself and pay a cashier

Moby Thesaurus II by Grady Ward, 1.0:

53 Moby Thesaurus words for "cafeteria":
   automat, beanery, bistro, buffet, buvette, cafe, canteen, cantina,
   chophouse, chuck wagon, coffee shop, coffeehouse, coffeeroom,
   commons, cookhouse, cookshack, cookshop, diner, dinette,
   dining car, dining hall, dining room, dining saloon, dog wagon,
   drive-in, drive-in restaurant, eatery, eating house,
   fast-food chain, grill, grillroom, hamburger stand, hash house,
   hashery, hot-dog stand, kitchen, lunch counter, lunch wagon,
   luncheonette, lunchroom, mess, mess hall, messroom, pizzeria,
   quick-lunch counter, refectory, restaurant, salle a manger,
   smorgasbord, snack bar, tavern, tearoom, trattoria